semiconductor wafer bonding

Wiley::SemiConductor Wafer Bonding: Science and Technology
Semiconductor Wafer Bonding addresses the entire spectrum of mainstream and
likely future applications of wafer bonding. It examines all of the important
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[PDF] Multiple Wafer Bonding for MEMS Applications
Preparation by semiconductor wafer direct bonding (no glue). →Reduced
temperature stress. →Applicable also at high temperatures ...


Low temperature silicon-to-silicon wafer bonding
Low temperature silicon-to-silicon wafer bonding has been successfully performed
using a sol–gel intermediate layer, with bond strengths of up to 35 MPa at ...


Semiconductor Wafer Bonding
Semiconductor Wafer Bonding. M. Reiche and T. Wilhelm. Hydrophillic wafer
bonding. Hydrophilic wafer bonding of silicon wafers was first discussed in 1986
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[PDF] SEMICONDUCTOR WAFER BONDING
versible wafer bonding has been suggested for the protection of semiconductor
surfaces from particles or organic contamination (41), but for almost all ...

Silicon Wafer Bonding Technology for VLSI and MEMS Applications ...
Advanced applications of wafer bonding, E.C.Jones and S.W.Bedell, Appendix 1: A
manufacturing process for silicon-on-silicon wafer bonding, K.Bansal and ...


Semiconductor Wafer Bonding Laboratory
New Book: Science and Technology of Semiconductor Wafer Bonding · Current
Publication List. Current Collaborations & Sponsors ...


Wafer Bonding Enables New Technologies and Applications - 2003-11 ...
1 Nov 2003 ... Whether the bonding process is activated by temperature, a plasma or chemicals,
the technology of wafer bonding is unifying different ...


Aligned Wafer Bonding for 3-D Interconnect - 2005-08-01 06:00:00 ...
1 Aug 2005 ... After a brief overview of viable 3-D technology platforms, this paper focuses on
wafer-level 3-D integration using aligned wafer bonding.


[PDF] Silicon-to-silicon wafer bond efficiency by sol-gel process ...
I. S. S. Iyer ef ai, Silicon Wafer Bonding Technology for. VIS1 and MEMS
Applications, Antony Rowe Ltd ... Q.-Y. Tong et ai, Semiconductor Wafer B o m b
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